Micromachining
Mostrando 1-12 de 14 artigos, teses e dissertações.
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1. Nonlinear Optical Properties and Femtosecond Laser Micromachining of Special Glasses
Materials specially designed for photonics have been at the vanguard of chemistry, physics and materials science, driven by the development of new technologies. One particular class of materials investigated in this context are glasses, that in principle should exhibit high third order optical nonlinearities and fast response time, whose optical properties c
J. Braz. Chem. Soc.. Publicado em: 2015-12
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2. Femtosecond lasers for processing glassy and polymeric materials
Novel materials have been developed to meet the increasing mechanical, electrical and optical properties required for technological applications in different fields of sciences. Among the methods available for modifying and improving materials properties, femtosecond laser processing is a potential approach. Owing to its precise ablation and modification cap
Mat. Res.. Publicado em: 27/09/2013
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3. Microcélulas a combustível a etanol direto. / Direct ethanol micro-fuel cells.
Microcélulas a combustível são dispositivos miniaturizados conversores de energia química em energia elétrica. Esse tipo de dispositivo tem sido amplamente estudado para atuar como substituto de baterias em dispositivos móveis, devido principalmente, a uma densidade de energia teoricamente maior se comparado às baterias. Nesse trabalho, foi desenvolvi
IBICT - Instituto Brasileiro de Informação em Ciência e Tecnologia. Publicado em: 09/03/2012
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4. Machinability study of steels in precision orthogonal cutting
The miniaturization of components and systems is advancing steadily in many areas of engineering. Consequently, micro-machining is becoming an important manufacture technology due to the increasing demand for miniaturized products in recent years. Precision machining aims the production of advanced components with high dimensional accuracy and acceptable sur
Materials Research. Publicado em: 03/07/2012
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5. Micromachined microwave planar spiral inductors and transformers
A new micromachined planar spiral inductor, with the strips suspended individually, has been fabricated in standard GaAs high electron-mobility transistor monolithic-microwave integrated-circuit technology through maskless front-side bulk micromachining. The electronic compatibility, the use of industrial integrated-circuit production lines, the straightforw
Publicado em: 2011
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6. Corrosão anisotropica e formação de superficie nanoestruturada de Si utilizando plasma de alta densidade / Si anisotropic etching and nanostructured surface formation using high density plasma
This work explores the implementation, characterization and applications of BOSCH type process for bulk silicon etching (or bulk silicon micromachining) using inductively coupled high density plasma (ICP). This etching process is characterized by its high anisotropy and is performed by alternating etching steps, employing SF6 + Ar gas mixture, and passivatio
IBICT - Instituto Brasileiro de Informação em Ciência e Tecnologia. Publicado em: 29/07/2009
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7. MEMS-PCB : tecnologia e implementação fisica de micro-chaves em placa de circuito impresso para aplicação em RF e micro-ondas / PCB-MEMS : technology and physical implementation of micro switches on printed circuit board for RF and microwave application
O desenvolvimento de chaves MEMS (Micro Electro Mechanical System) de RF, usando os conceitos e a tecnologia de placa de circuito impresso (PCB) é objeto desta pesquisa. Foram fabricadas micro-chaves na configuração paralela, sobre guias de onda coplanares (CPW). Recentemente, suas aplicações vêm sendo direcionadas a circuitos mais sofisticados, onde s
Publicado em: 2009
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8. Microeletronic pressure sensor based on the transversal piezoresistive effect in silicon / Sensor de pressão microeletronico baseado no efeito piezoresistivo transversal em silicio
This work describes a CMOS-Compatible multiterminal piezoresistive pressure sensor based on the transversal piezoresistive effect, which consists of a piezotransducer fabricated on a membrane. The layout of this piezoelement is designed in such a way that its sensitivity is improved by maximizing the effect of the mechanical stress over the equipotential lin
Publicado em: 2008
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9. Avaliação da replicagem de moldes torneados com ferramenta de diamante usando prensagem a quente em polimetilmetacrilato (PMMA) / Evaluation of the replication of molds generated from single point diamond turning using hot embossing in polymethylmethacrylate (PMMA)
In this work, different types of microstructures were generated by single point diamond turning and microindentation for will replicated through the hot embossing. Tests were carried to evaluate the generation these microstructures by two distinct methods: micro-deformation and micro-machining, planned to observe the replication of the mark generated by the
Publicado em: 2006
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10. Obtenção e caracterização de filmes finos de oxido, nitreto e oxinitreto de silicio por deposição ECR-CVD / Synthesis and characterization of oxide nitride and silicon oxynitride thin films by ECR-CVD
In this work, silicon nitride (SixNy), oxide (SiOx) and oxynitride (SiOxNy) thin films obtained by remote plasma chemical vapor deposition (RPCVD) on silicon substrate were studied and characterized for micromachining or micro electro-mechanical system (MEMS) applications. Silicon nitride films (SixNy) were used in suspended structures (membranes and bridges
Publicado em: 2005
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11. Projeto de atuadores piezelétricos flextensionais usando o método de otimização topológica. / Design of flextensional piezoelectric actuator using the topology optimization method.
Flextensional Piezoelectric Actuators consist of a flexible structure actuated by piezoelectric ceramics (or a stack of piezoceramics). The flexible structure connected to the piezoceramic must generate displacements and forces in different specified points of the domain, according to a specific direction. These actuators are applied to precision mechanic ap
Publicado em: 2003
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12. An electromechanical material testing system for in situ electron microscopy and applications
We report the development of a material testing system for in situ electron microscopy (EM) mechanical testing of nanostructures. The testing system consists of an actuator and a load sensor fabricated by means of surface micromachining. This previously undescribed nanoscale material testing system makes possible continuous observation of the specimen deform
National Academy of Sciences.