Oxidation Sharpening
Mostrando 1-2 de 2 artigos, teses e dissertações.
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1. Contribution to the study of ultra-sharp silicon microtips fabrication process / Contribuição ao estudo do processo de fabricação de microponteiras de silicio ultra-finas
In this work, we present a contribution to the study of ultra-sharp silicon microtips fabrication process using oxidation sharpening technique. The silicon microtips were fabricated and submitted to repeated oxidation steps and oxide strip to achieve ultra-sharp tips. SEM (Scaning Electronic Microscopy) investigation were performed to observe the gradual tip
Publicado em: 2007
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2. Fabrication and electrical characterization of field emission tips covered by DLC (Diamond Like Carbon) thin films / Fabricação e caracterização eletrica de ponteiras de emissão de campo recobertas com filme fino DLC (Diamond Like Carbon)
The objectives of this dissertation were the fabrication of silicon field emitter tips coated with diamond like carbon (DLC) thin films, and the study of its electrical behavior. We present the fabrication process of silicon tips that consists on four stages: photolithography, reactive ion etching SF6 plasma, thermal oxidation for sharpening, and the DLC dep
Publicado em: 2005